Keyence VK-X3000

The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. The VK-X3000 has a resolution of 0.01 nm (white light interference) and can scan areas up to 50 × 50 mm (1.97″ × 1.97″), allowing for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. The 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles. The system has a VK-X3100 measurement head with a violet laser (0.1 nm resolution, ±(0.2+L/100) µm accuracy where L is the measuremment length in µm with 50X lens), a motorized 100 mm by 100 mm XY stage, batch processing and image stiching software, and access to an API to drive the measurement. Full data can be exported for use on custom software. Spectral interference film thickness measurement for films between 100-5000 nm thick has repeatability to 0.1 nm and ±0.6% accuracy.

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