Our new Ga FIB is a Zeiss Crossbeam 550 featuring a Gemini II SEM column and Ion-sculptor FIB column. The Gemini II SEM column is a very stable electron column that boasts high-resolution even at low voltages and high currents due to the double condenser system. The combination of electrostatic and magnetic fields in the objective lens also allows for minimal field effects at the sample. High quality images of even the toughest samples, such as
magnetic materials, are possible. The Ion-sculptor FIB column can achieve fast milling at high currents while also offering high performance at low voltages. The stability and performance of the ion column make it the perfect tool for TEM lamella preparation.
The system is also outfitted with a load-lock for fast sample transfer and an Oxford Omniprobe 400 micromanipulator for lift-out. There are no analytical detectors.
Resolution
• 1.4 nm at 1 kV (SEM)
• 0.6 nm at 30 kV (STEM)
• 3 nm at 30 kV (FIB)
Accelerating Voltage
• 0.02 to 30 kV (SEM)
• 0.5 to 30 kV (FIB)
• 0.02 to 30 kV (SEM)
• 0.5 to 30 kV (FIB)
Probe Current
• 10 pA to 100 nA (SEM)
• 1 pA to 100 nA (FIB)
Detectors
• SESI (Secondary electron secondary ion)
• Inlens SE (in column SE detector)
• Inlens EsB (in column BSE detector with filtering grid)
• aSTEM4 (STEM detector with BF, DF, ODF, ADF, and HAADF)
Gas Injection System
• Platinum
• Carbon