Equipment

Specifications

Resolution

1.2 nm at 30 kV; 2.3 nm at 3 kV.

Detectors

  • SE Everhart Thornley Detector
  • Scintillator Backscatter Detector
  • Scanning Transmission Electron Microscopy (STEM) Detector
  • Oxford X-ACT EDS Detector

Stage

  • X,Y = 80,60 mm
  • Z = 47 mm; 54 mm clearance with rotation stage / 81 mm without
  • T = - 80° to + 80°
  • R = 360° continuous
  • Repeatability: <1 μm (x and y)
  • Tilt-eucentric at 10 mm mounting height for all working distances
  • X and Y movements are in the tilt plane

Equipment Information

Location Roberts Hall

Function SEM

Contact Neal Lewis

Rates and materials

  • Rate type: Hourly
  • CMU (Internal): $65