The Sigma 560 VP SEM is equipped with Zeiss’ in situ solution. The in situ solution features a Deben stage capable of applying both load and heat (specifications below) and Zeiss’ In Situ Lab software that integrates control of the microscope, Deben stage, and Oxford analytical detectors.
Electron Beam
- Accelerating Voltage: 0.02 kV to 30 kV
- Probe Current: 3 pA to 100nA
Resolution
- 7 nm at 15 kV
- 2 nm at 1 kV
- 5 nm at 500 V
- 5 nm at 30 kV (VP Mode)
Detectors
- SE Everhart-Thornley Detector
- In-lens SE Detector
- VPSE Detector
- KARMEN high temperature BSE detector
Stage
- XY range: 130 mm
- Z range: 50 mm
- Tilt range: -4° to 70°
- Rotation: 360° continuous
Deben Stage
- Force: 5000 N
- Temperature Range: RT - 800°C
- Flat sample jaws and 70° tilt jaws for EBSD
Analytical Detectors
- Oxford UltimMax 100mm2 EDS Detector
- Oxford Symmetry S3 EBSD Camera