Tescan Mira 3 FEG SEM

A field emission scanning electron microscope offering multiple imaging modes for high-resolution imaging, wide field-of-view, or large depth-of-focus. The microscope can be operated at accelerating voltages from 1-30 kV.

Tescan Mira 3 FEG SEM

Specifications

Resolution

1.2 nm at 30 kV; 2.3 nm at 3 kV.

Detectors

  • SE Everhart Thornley Detector
  • Scintillator Backscatter Detector
  • Scanning Transmission Electron Microscopy (STEM) Detector
  • Oxford X-ACT EDS Detector

Stage

  • X,Y = 80,60 mm
  • Z = 47 mm; 54 mm clearance with rotation stage / 81 mm without
  • T = - 80° to + 80°
  • R = 360° continuous
  • Repeatability: <1 μm (x and y)
  • Tilt-eucentric at 10 mm mounting height for all working distances
  • X and Y movements are in the tilt plane