FEI Quanta 600 FEG SEM

The Quanta 600 FEG Scanning Electron Microscope is a versatile, high-performance instrument with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. The Quanta SEM system is equipped with analytical systems, energy dispersive spectrometer, and electron backscatter diffraction. The Quanta 600 FEG has a large chamber, enabling the analysis and navigation of large specimens with a motorized stage (50mm, 100mm, and a motorized z-range of 150mm)

Specifications

Electron beam resolution

  • High vacuum
    0 nm* at 30 kV (SE)
    2.5 nm at 30 kV (BSE)
    3.0 nm at 1 kV (SE)
  • High vacuum with beam deceleration option
    0 nm at 1 kV (BD mode + BSED)
    2.3 nm at 1 kV (BD mode + ICD*)
    3.1 nm at 200 V (BD mode + ICD)
  • Low vacuum
    4 nm at 30 kV (SE)
    2.5 nm at 30 kV (BSE)
    3.0 nm at 3 kV (SE)
  • Extended vacuum mode (ESEM)
    4 nm at 30 kV (SE)

Detectors

Everhardt Thornley SED (secondary electron detector)

  • Large Field Low vacuum SED (LFD)
  • Gaseous SED (GSED) (used in ESEM mode)
  • High sensitivity low kV SS-BSED
  • IR camera for viewing sample in chamber
  • Gaseous BSED (BSE detector for high pressures, used in ESEM mode)
  • 4 quadrant solid-state BSED
  • vCD (low voltage high contrast detector)
  • Electron beam current measurement
  • Gaseous analytical BSED (GAD)

Oxford INCA EDS System full analytical, XMAX 80mm SDD EDX detector.

Oxford HKL EBSD System with high speed HKLNordlysNano camera.

HYSITRON PI-85 SEM PicoIndenter.