The Quanta 200 FEG Scanning Electron Microscope is a versatile, high-performance instrument with three modes (high vacuum, low vacuum, and ESEM) to accommodate the widest range of samples of any SEM system. The Quanta 200 FEGSEM system is optimized as a dedicated OIM (Orientation imaging by Electron Backscatter Diffraction) microscope. The Quanta 200 FEG chamber and stage has high tilt capabilities -5° to +80° enabling the optimized EBSD analysis.
Electron beam resolution
- High vacuum
0 nm* at 30 kV (SE)
2.5 nm at 30 kV (BSE)
3.0 nm at 1 kV (SE)
- High vacuum with beam deceleration option
0 nm at 1 kV (BD mode + BSED)
2.3 nm at 1 kV (BD mode + ICD*)
3.1 nm at 200 V (BD mode + ICD)
- Low vacuum 1.4 nm at 30 kV (SE)
5 nm at 30 kV (BSE)
3.0 nm at 3 kV (SE)
- Extended vacuum mode (ESEM)
4 nm at 30 kV (SE)
Everhardt Thornley SED (secondary electron detector)
- Large Field Low vacuum SED (LFD)
- Gaseous SED (GSED) (used in ESEM mode)
- High sensitivity low kV SS-BSED
- IR camera for viewing sample in chamber
- Gaseous BSED (BSE detector for high pressures, used in ESEM mode)
- 4 quadrant solid-state BSED
The Hikari is a full featured, completely integrated CCD-based detector for EBSD applications.
Hikari can achieve simultaneous acquisition and indexing speeds up to 450 patterns per second for many materials.