FEI Quanta 200 FEG SEM

The Quanta 200 FEG Scanning Electron Microscope is a versatile, high-performance instrument with three modes (high vacuum, low vacuum, and ESEM) to accommodate the widest range of samples of any SEM system. The Quanta 200 FEGSEM system is optimized as a dedicated OIM (Orientation imaging by Electron Backscatter Diffraction) microscope. The Quanta 200 FEG chamber and stage has high tilt capabilities -5° to +80° enabling the optimized EBSD analysis.

Quanta 200 SEM


Electron beam resolution

  • High vacuum
    0 nm* at 30 kV (SE)
    2.5 nm at 30 kV (BSE)
    3.0 nm at 1 kV (SE)
  • High vacuum with beam deceleration option
    0 nm at 1 kV (BD mode + BSED)
    2.3 nm at 1 kV (BD mode + ICD*)
    3.1 nm at 200 V (BD mode + ICD)
  • Low vacuum 1.4 nm at 30 kV (SE)
    5 nm at 30 kV (BSE)
    3.0 nm at 3 kV (SE)
  • Extended vacuum mode (ESEM)
    4 nm at 30 kV (SE)


Everhardt Thornley SED (secondary electron detector)

  • Large Field Low vacuum SED (LFD)
  • Gaseous SED (GSED) (used in ESEM mode)
  • High sensitivity low kV SS-BSED
  • IR camera for viewing sample in chamber
  • Gaseous BSED (BSE detector for high pressures, used in ESEM mode)
  • 4 quadrant solid-state BSED
EDAX/TSL System with Hikari EBSD Detector

The Hikari is a full featured, completely integrated CCD-based detector for EBSD applications.

Hikari can achieve simultaneous acquisition and indexing speeds up to 450 patterns per second for many materials.