Thermofisher Scientific Nanolab 600 Dual Beam FIB

Electron optics

High-resolution FEG-SEM column, monopole magnetic immersion final lens, Schottky thermal field emitter, 60-degree objective lens geometry, and heated objective apertures.

Voltage Range: 0.2 to 30.0 kV

Current Range: 10 pA to 20 nA

Resolution at optimum working distance (5.4 mm):

  • 1 nm @ 15 kV (TLD-SE)
  • 5 nm @ 1 kV (TLD-SE)
  • 5 nm @ 500 V (TLD-SE)
  • 5 nm @ 500 V (TLD-BSE)

Resolution at beam coincidence point:

  • 0 nm @ 30 kV (STEM)
  • 5 nm @ 15 kV (TLD-SE)
  • 0 nm @ 5 kV (TLD-SE)

Ion optics

Magnum TM ion column with Ga liquid metal ion source with 7 nm resolution (5 achievable). Maximum horizontal field width of 2.5 mm at 5 kV and the beams coincidence point.

Voltage Range: 5 to 30 kV

Current Range: 1 pA to 20 nA

Detectors

  • Through lens secondary electron detector (TLD-SE)
  • Through lens secondary backscattered electron detector (TLD-BSE)
  • Everhardt-Thornley secondary electron detector (ETD-SE)
  • IR-CCD camera

Gas chemistry

  • Zero collision gas injection system (GIS)
    • 5 ìm placing accuracy without user interaction
    • GIS control available for automation
    • Reconfigurable individual gas injectors (up to 5 gas injectors)
  • Gas chemistry options:
    • Platinum metal deposition
    • Tungsten metal deposition

Fabrication and machining

  • Minimum deposited line width:
    • Ion beam, Pt: 50 nm achievable
    • Electron beam, Pt: 20 nm achievable
  • Minimum etched line width (Si): <15 nm achievable
  • Maximum hole aspect ratio (Si, 500 nm hole radius): 10:1
  • Maximum hole aspect ratio (Si, 500 nm hole radius, XeF2, coaxial needle): 10:1
  • Typical TEM sample membrane thickness: 50-100 nm (30-50 achievable)

Sample manipulation

Omniprobe Autoprobe 200 nanomanipulator lift-out tool

EDAX/TSL System with Hikari EBSD Detector

  • Full featured, integrated CCD-based detector for electron backscattered diffraction applications (EBSD)
  • Simultaneous acquisition and indexing speeds of up to 450 patterns per second for many materials