Carnegie Mellon Engineering

Microsystems Research Cluster Overview 

The Microsystems Research Cluster is a collection of research laboratories having a common interest in microfabricated systems for sensor and actuator applications. Projects span virtually every aspect of microsystems research including bio/chemical sensors, bioimplantable sensors, MEMS/microfluidic design and modeling, inertial sensors, probe-reconfigurable systems, MEMS/electronics integration, MEMS test, microfluidics, micromirror arrays, microrobotics, microscale cellular mechanics, miniature machine tools, nano/microscale tribology, and RF MEMS tunable passives.